ASPE 2010 Summer Topical Meeting > The Meeting on Precision Interferometric Metrology was held on June 23-25, 2010 at The Crowne Plaza Resort in Asheville, North Carolina. The Meeting Co-Chairs were Chris J. Evans and Peter de Groot or Zygo Corporation and Angela D. Davies of the University of North Carolina at Charlotte.
Precision Interferometric Metrology > Applications such as flat panel displays, IC manufacturing, automotive systems and basic science are driving demand for lower uncertainty measurements in ever more challenging environments. This meeting covered new developments in interferometric metrology – including new concepts and analyses, instrument development and application examples. In addition to paper sessions, there was open discussion sessions and opportunities to make brief informal presentations on a variety of topics of interest. The talks covered a broad range of technologies and highlighted potential areas for future development.
The Objective > This meeting brought together specialists and practitioners from industry, government and academia to provide a forum for the exchange of ideas. The meeting emphasized discussions as much as the presentations and the participants were encouraged to identify areas needing further research.
Relevant Topics > Tools for form, figure and waviness; Free form optics and aspheres; Roughness and texture analysis; Stage motion control; Big science projects: Telescope mirrors, space based applications, gravity wave detection; Interference microscopy; Micro-structure metrology; Dynamic measurements; High precision in adverse environments; Thin films, patterned surfaces and dissimilar, materials; Lateral resolution beyond conventional limits; Semiconductor wafer metrology; Heroic interferometry at the limits of "what can be done;" Unconventional sources and wavelengths, including UV, DUV, infrared and Terahertz; and Lost arts: Historical techniques enjoying a new life.
The 4th ASPE Topical meeting on Precision Interferometric Metrology > followed the format of its successful predecessors – most recently in Middlefield, CT in 2005 -- with meetings in the morning, an evening Open Forum, and an afternoon free to discuss technical details, play sports, walk, shop, or just relax.
John H. Bruning - Keynote Speaker > "The Fusion of Interferometry and Microelectronics -- Personal Views" was the title of the 2004 ASPE Lifetime Achievement Award recipeint Dr. John H. Bruning's talk. John Bruning has been involved in advancing the state-of the-art of photolithography and has contributed significantly to many of the key events in the history of this key technology. John Bruning received a bachelor's degree from Penn State University and a master's and doctorate from the University of Illinois, all in electrical engineering. His doctoral work, completed in 1969 dealt with multiple scattering of electromagnetic and acoustic waves by spheres. Upon graduation, John started at Bell Laboratories in Murray Hill as a member of the technical staff in the optical group. Early work involved the development of high accuracy interferometry for testing precision optical surfaces and lenses. Out of this work came a fundamentally new approach to interferometry known as phase measuring interferometry (PMI), which is the basis of most modern digital interferometers. This development has enabled 10-100 times greater accuracy in manufactured lens components for optical lithography and other precision optics applications. Read more about Dr. Bruning>>>
Invited Speakers > ASPE proudly to welcomed the following invited speakers to the conference: F. Riepenhausen, B. Doerband, S. Schulte (Carl Zeiss SMT, Oberkochen, Germany) “Retrace and Propagation Error in a Non-null Interferometer;" J. Lawall (National Institute of Standards and Technology, Gaithersburg, MD) “Picometer Displacement Metrology for Fundamental Standards;” B. Vakoc (Harvard-MIT Division of Health Sciences and Technology, Wellman Center for Photomedicine, Cambridge, Ma) “Optical Interferometry in Medical and Biological Imaging - Recent Technical Advances and Commercial Opportunities;” V. Quetschke (University of Texas) "LIGO – A Look Behind Attometer (10 ^-18 m) Sensitivity and Beyond."
UNC Charlotte > was host to a sold-out laboratory tour.
Asheville at a Glance > Asheville is that type of unique, special place that lingers fondly in your mind and memories for years to come. The city's rich architectural legacy with its mix of Art Deco, Beaux Arts and Neoclassical styles is the perfect retro-urban backdrop to the edgy energy that emanates from the locally owned-shops and art galleries, distinctive restaurants and exciting entertainment venues. Known as an art colony, a healing resort and a home to notable luminaries, statesmen and bohemians, Asheville is one of the most welcoming, vibrant cities in America.
A bastion of cutting-edge art and technology in the Blue Ridge, the city also prides itself on its fascinating Appalachian past and celebrates this. While many cities underwent major overhauls in past decades, Asheville's historic and architecturally diverse downtown remains beautifully preserved.
There's something special about Asheville, and the world is just beginning to discover it. This thriving mountain city features a funky and eclectic downtown, 30-plus art galleries downtown alone, a burgeoning culinary scene and excellent restaurants, a thriving live music scene and, of course, the awe-inspiring scenery of the Appalachian Mountains.
Scientific Committee > K-F Beckstette, Carl Zeiss Jena, Germany; B. Dörband, Carl Zeiss SMT AG, Germany; W. T. Estler, National Institute of Standards and Technology, USA; G. Forbes, QED, Australia; G. Hausler, University of Erlangen, Germany; O. Lay, Jet Propulsion Laboratory, USA; H. Ottevaere, Vrije Universiteit Brussel, Belgium; G. Owen, Agilent, USA; R. Parks, University of Arizona, USA; J. Schmit, Veeco, USA